VATT 2000-3M vacuum coater
Is used for application of multilayer coatings of metals and metal compounds on plane surfaces with dimensions 1600x2400 by means of magnetron sputtering.
VATT-2000-3M is a one-chamber periodic plant with magnetron sputterers sliding back and forward along the chamber.
Main benefits of magnetron sputtering method employed in this plant are high film deposition rate and high reproducibility of deposited substance. Reciprocative sliding of magnetrons ensures good uniformity of coated film along the whole chamber.
Film thickness optical control system affords an opportunity of direct control during coating process and provides reproducibility of optical properties of glass.
Technical features
* Production output, m2 / cycle
Low-e coating-7. 68;
Mirror-15. 36;
* End vacuum-5*10-5 mm Hg max;
* 1*10-4 mm Hg vacuum achievement time-30 minutes max;
* Cooling water consumption-1. 2 m3 / h max;
* Average power consumption-28 kW;
* Peak power consumption-38 kW;
* Dimensions when the lid is open-5500x3150x2650
Is used for application of multilayer coatings of metals and metal compounds on plane surfaces with dimensions 1600x2400 by means of magnetron sputtering.
VATT-2000-3M is a one-chamber periodic plant with magnetron sputterers sliding back and forward along the chamber.
Main benefits of magnetron sputtering method employed in this plant are high film deposition rate and high reproducibility of deposited substance. Reciprocative sliding of magnetrons ensures good uniformity of coated film along the whole chamber.
Film thickness optical control system affords an opportunity of direct control during coating process and provides reproducibility of optical properties of glass.
Technical features
* Production output, m2 / cycle
Low-e coating-7. 68;
Mirror-15. 36;
* End vacuum-5*10-5 mm Hg max;
* 1*10-4 mm Hg vacuum achievement time-30 minutes max;
* Cooling water consumption-1. 2 m3 / h max;
* Average power consumption-28 kW;
* Peak power consumption-38 kW;
* Dimensions when the lid is open-5500x3150x2650
Main Products
vacuum coating equipment for glass, mirror production lines,